The ACR-490UT precision rotation stage is the lowest profile rotary table with high-speed direct-drive rotary servomotor on the market. It features a large 490 mm center aperture and lightweight construction which makes this rotary stage an ideal choice for handling large diameter silicon wafers for semiconductor processing. ACR-490UT has a very wide dynamic speed range and can move at sub-rpm speed with very low velocity ripple and accelerate quickly to 300 rpm.  

 

This stage can be easily installed into Intellidrives low profile open frame XY tables with a minimal stack-up height to minimize Abbe error. Ultra-thin series direct-drive rotary stages provide superior angular positioning and velocity control. Applications range from precision indexing to high-speed laser machining to precision wafer inspection. Intellidrives offers a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.